Surplus Process Equipment Corporation
Equipment for Sale:
Search by Manufacturer: >> GaSonics        >> KLA Tencor        >> Karl Suss        >> ADE         China
 
 
Search by Equipment Type:
New Arrivals
Asher Systems
Chillers
Cleaning Systems
Dicing Saws
Ellipsometers/Film Thickness Measurement
Etchers
Evaporators
Furnaces-Autoclaves
Gas Cabinets
HMDS Equipment
Inspection Systems
Ion Implantors
Ion Mills
Laser Marking Systems
LPECVD
Mask Aligner - Exposure Systems - UV
Mask Equipment
Metrology - Test & Inspection System
Microscopes-Comparators
Miscellaneous
Ovens
PECVD - Oxidation
Photoresist Coaters-Tracks
Plasma Ashers
Plasma Etchers
Power Supplies-RF-Plasma-E-Gun
Pumps-Vacuum
Reactors
RIE
Robots-Stages-Material Handling
RTA - RTP Rapid Thermal Annealing/Processor
SEM - Scanning Electron Microscopes
Spin Rinser Dryer
Sputtering Systems
Steppers
UV Systems
Vacuum Valves-Chambers-Systems
Vibration-Isolation Tables
Wet Process Systems-Stripper-Develop
X-Ray
Search by Part Type:    All Parts
GaSonics Parts
KLA-Tencor Parts
ADE Parts
Karl Suss Parts
Miscellaneous Parts
See our entire inventory
 
 

Our certified technicians can remanufacture and refurbish equipment back to the original manufacturer's specifications. Or we can provide custom engineering and upgrades to meet your needs. All equipment we remanufactured and service is preformed in a Class 1000 and 100 clean room in our 12,000 square foot manufacturing facility.

We provide:

      Sales and service

  • Refurbishing and remanufacture
  • Technical service and support
  • Installation & start-up
  • Calibration or re-calibration
  • Replacement parts

      Processes we specialize in

  • Metrology
  • Ash and Etch - descum
  • Rapid Thermal Annealing - Diffusion
  • Photolithography

      Key Manufacturers

  • GaSonics
  • KLA-Tencor
  • Karl Suss
  • AG Associates

      Other Services

  • Onsite training: maintenance/process
  • Service contracts and warranties
  • 24-hour response time & hotline for troubleshooting
  • 48-hour onsite response
  • Rapid turn around time on all parts delivery

Contact us today!

Contact us today!