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KLA-Tencor Alpha Step 200 Profiler System Features/Specifications:
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Vertical sensitivity: Measures the small steps - 20 to 50Å
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Vertical resolution is 5Å with ± 160kÅ range, 5 nm with ± 160 mm range
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Video Zoom 40x to 120x magnifications
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Horz. Resolution max. 1 data point every: 400Å
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Max Sample Size Measures to center of 162mm (6.4") sample
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Stylus force .8 - 9.9 @ .1mg steps or to 25mg @1mg steps
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Vertical Resolution (max.) 1A w/ ± 32kA range; 5A w/ ± 160kA range
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